PEB:后烘
“后烘”(Post Exposure Bake)在学术与电子科技领域常被简写为PEB,这一术语特指曝光后的烘烤工序,其缩写形式便于快速记录与沟通。该工艺在半导体制造与微电子加工中尤为关键,有助于优化光刻胶的性能并提升图形转移的精确度。
Post Exposure Bake的英文发音
例句
- This paper studied experimentally the influences of processing steps of UV-LIGA, including before post exposure bake, exposure, development, resist removal, micro electroforming, on the quality of micro-structures micro-devices fabricated on metal-substrate, and optimized their operation conditions and processing parameters.
- 试验研究了UV-LIGA各工艺环节(包括前后烘(PEB)、曝光、显影、去胶、电铸等)对金属基片上制造金属微结构器件质量的影响,并组合优化了操作条件和工艺参数。
- In this chapter we will use the post exposure bake method to solve the satellite defect.
- 本章节就是对曝光后光酸烘烤反应入手解决此缺陷。
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